Nano-metrology for materials and life sciences as well as for nano-scale production,.These challenges are inherent in various application domains that have been identified in our research and that we address in the neighboring research fields of scientific imaging systems and precision motion systems, including: Integrated mechatronic design of a high-speed atomic force microscope (AFM) for imaging 1000-times faster than with conventional AFMs. Simultaneously most of the future applications demand a low cost and robust implementation. Further requirements may be modular system design, the potential of re-usability of individual sub-systems, and re-configurability of the overall integrated system. Examples for these components are the mechanical structure of the device as well as the power amplifiers, the actuators, the sensors, the control system, and the eventual application. Already at the system design phase all components involved in the specific application have to be considered. In this area we develop methods to systematically analyze, model, and synthesize the interplay between process design and control design. Integrated system design and advanced control will play an important role in future technology, where increasing demands on highest precision and throughput require advanced mechatronic designs and highly sophisticated controllers. Our research activities in the field of mechatronic design and system integration aim towards the development of an integrated systems design approach, including theoretical aspects and advanced control methods, for precision motion systems, mechatronic imaging and measurement systems, as well as for modular robotic systems. Mechatronic Design & System Integration Mechatronische Systemintegration
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